describe the image

More Information

View product specs of Entegris' liquid filter line.

 

Request A Quote

Entegris/Mykrolis Liquid Filters

Entegris  Mykrollis Liquid FiltersThe Entegris liquid filtration line includes well-known brands such as Wafergard, Guardian, Protego, Intercept, Microgard, Quickchange, Optimizer, Impact, Fluorogard, Processgard, Planargard, and Durapore. Entegris filters offer contamination control of process liquids in semiconductor applications such as CMP slurries, wet-etch and cleans acids, photochemistry and DI water. All these processes require advanced filtration to remove defect-causing particles and agglomerate before reaching the wafer or substrate surface. The Entegris product line includes both cartridge filters and disposable filters with state of the art connectology. Integra offers technical assistance in finding the right product for your application. Membrane types include UPE, Fluoropolymer, PVDF, PES and Polypropylene. Entegris is the expert in membrane surface modification which creates a filter designed for your chemistry and application with the least amount of downtime.