Entegris offers the most complete line of high purity valve products available. No matter what your fluid control needs, Entegris can provide a fully characterized, reliable valve that meets your temperature, pressure, flow, size, configuration and installation specifications.
Diaphragm Valves
Integra® valves have PTFE or all molded PFA wetted surfaces for unmatched purity, chemical inertness and high temperature capabilities. These valves do not have any external metal parts that can corrode and represent a safety hazard in aggressive chemicals. 1/4", 1/2" and 1" sizes are available in manual or pneumatic 2-way, 3-way and sampling styles. Custom 4-port valves are available, as are remote position indication and leak detection options.
Integra® valves are available compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Please consult the factory for more information.
Galtek® diaphragm valves have all-PFA wetted surfaces and a small physical size, ideally suiting them to high purity, corrosive applications where space is limited. Pneumatic or manual actuation is available in 2-way, 3-way and custom manifold configurations.
Plug Valves
The Magnaflo® plug valve can be used in the same applications as traditional ball valves. This unique valve couples corrosion resistance and a straight-through flow path, offering a high flow, durable solution to aggressive chemical handling. Unlike metal valves, the Magnaflo® valve’s all polymer exterior is also corrosion resistant. Available in 1/4" or 1/2" manual versions.
Metering Valves
The Accuflo™ metering valve is the first metering valve to be fully molded from PFA. The all-PFA construction offers unrivaled durability in your corrosive environments. Configured as a five-turn, 1/4" manual valve, the Accuflo™ valve provides enhanced control for chemical, semiconductor and other applications requiring an adjusted flow, while also featuring a longer life than metal alloy valves.
Accessory Valves
Entegris offers a complete line of Galtek® control valves for your high purity, high corrosive fluid control applications. All wetted parts are made from PFA or PTFE providing corrosion resistance. Needle valves, stopcocks, solenoids, check valves and fast action plug valves are available in a wide variety of styles and sizes.